W. Zhang – Measurement Technology for Micro-Nanometer Devices (2016)

Автор: W. Zhang
Название книги: Measurement Technology for Micro-Nanometer Devices
Формат: PDF
Жанр: Приборостроение
Страницы: 338
Качество: Изначально компьютерное, E-book

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale:
Highlights the advanced research work from industry and academia in micro-nano devices test technology
Written at both introductory and advanced levels, provides the fundamentals and theories
Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience.
Table of Contents
About the Authors
Preface
Introduction
Geometry Measurements at the Micro/Nanoscale
Dynamic Measurements at the Micro/Nanoscale
Mechanical Characteristics Measurements
SPM for MEMS/NEMS Measurements
MEMS Online Measurements
Typical Micro/Nanoscale Device Measurements
Index