T. Mieno – Plasma Science and Technology Progress in Physical States and Chemical Reactions (2016)

Автор: T. Mieno
Название книги: Plasma Science and Technology Progress in Physical States and Chemical Reactions (2016)
Формат: PDF
Жанр: Физика
Страницы: 561
Качество: Изначально компьютерное, E-book

In the early twentieth century, Dr. Irving Langmuir actively studied
plasma discharge and surface science. Since then, great progress
has been made in the development of applications of discharges
and plasmas such as discharge lamps, electric tubes, and arc
welding.
In relation to studies on space physics and controlled nuclear
fusion, plasma physics has greatly advanced.
Plasma chemistry has also progressed along with its applications in
LSI fabrication technology, the chemical vapor deposition of
functional films, and the production of nanomaterials.
In the twenty-first century, the further development of applications
of plasma physics and plasma chemistry is certainly expected.
In this book, 18 chapters on the recent progress in plasma science
and technology have been written by active specialists worldwide.