H. Bhugra – Piezoelectric MEMS Resonators (2017)

Автор: H. Bhugra
Название книги: Piezoelectric MEMS Resonators
Формат: PDF
Жанр: Приборостроение
Страницы: 423
Качество: Изначально компьютерное, E-book

This book is meant to introduce piezoelectric microelectromechanical system (MEMS) resonators to a broad audience of engineers, graduate students, and researchers with the scope of offering a review of the field as well as generating excitement for future research work and stimulating entrepreneurial activities in this area.
Contents
Materials for Piezoelectric MEMS Resonators
AlN Thin Film Processing and Basic Properties
Lead Zirconate Titanate (PZT) for M/NEMS
Gallium Nitride for M/NEMS
Lithium Niobate for M/NEMS Resonators
Design of Piezoelectric MEMS Resonators
Quality Factor and Coupling in Piezoelectric MEMS Resonators
Flexural Piezoelectric Resonators
Laterally Vibrating Piezoelectric MEMS Resonators
BAW Piezoelectric Resonators
Shear Piezoelectric MEMS Resonators
Temperature Compensation of Piezo-MEMS Resonators
Computational Modeling Challenges
Manufacturing and Reliability of Piezoelectric MEMS Resonators
Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators.
Reliability and Quality Assessment (Stability and Packages)
Large Volume Testing and Calibration
Real World Implementations
High Frequency Oscillators for Mobile Devices
BAW Filters and Duplexers for Mobile Communication