Z. Cui – Nanofabrication (2017)

Автор: Z. Cui
Название книги: Nanofabrication
Формат: PDF
Жанр: Нанотехнологии
Страницы: 445
Качество: Изначально компьютерное, E-book

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
Contents:
Introduction
Nanofabrication by Photons
Nanofabrication by Electron Beam
Nanofabrication by Ion Beam
Nanofabrication by Scanning Probes
Nanofabrication by Replication
Nanoscale Pattern Transfer by Etching
Nanoscale Pattern Transfer by Deposition
Indirect Nanofabrication
Nanofabrication by Self-Assembly
Applications of Nanofabrication Technologies